Scanning Electron Microscope

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Overview

The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additional software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling. The SEM is a useful tool for photonics research because it reveals nano-scale surface features and topography that is critical to the performance of multi-layer devices.

Significance

In addition to producing detailed dramatic pictures that reveal 3D shapes the SEM can be equipped with auxilliary features so it be used for elemental analysis using EDAX and ebeam lithography.

Operation

Part 1 Tour and Sample Preparation

Part 2 Loading the Sample

Part 3 Setting the Working Distance

Part 4 Lens Alignment and Stigmation

Part 5 Moving the Stage and Imaging

Part 6 Changing the Sample and Shutdown

External Links

• Training Manual for Sirion SEM

• Training video for Hitachi 3500H SEM at GT MiRC
• wikipedia:Scanning_electron_microscope Scanning Electron Microscope
• wikipedia:Energy-dispersive_X-ray_spectroscopy EDAX