Scanning Electron Microscope

From CleanEnergyWIKI
Revision as of 09:19, 21 December 2009 by 128.95.39.42 (talk) (→‎Operation)
Jump to navigation Jump to search

Overview

Sirion sem.png

The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additional software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling.



See Wikipedia on Scanning Electron Microscope

Operation

Part 1 Tour and Sample Preparation

Part 2 Loading the Sample

Part 3 Setting the Working Distance

Part 4 Lens Alignment and Stigmation

Part 5 Moving the Stage and Imaging

Part 6 Changing the Sample and Shutdown


Training Manual for Sirion SEM[1]

Training Video on Hitachi 3500H SEM at GT MiRC

Significance

Retrieved from "http://cleanenergywiki.org/index.php?title=Scanning_Electron_Microscope&oldid=5827"