Ellipsometer
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Overview
An elipsometer is used measure the dielectric properties (including refractive index and dielectric function) of thin films. It is useful for determining these properties
- film thickness
- refractive indices
- surface roughness
- interfacial mixing
- composition
- crystallinity
- anisotropy
- uniformity
Significance
<math>\rho</math> (a complex quantity), which is the ratio of <math>r_p</math> over <math>r_s</math>:
- <math>\rho = \frac{r_p}{r_s} = \tan ( \Psi ) e^{i \Delta}</math>
- <math>\Delta = \delta_p - \delta_s\,\!</math> is the phase difference
- <math>\Psi\,\!</math> is the amplitude ratio
- <math>N= cos(2\Psi)\,\!</math>
- <math>C= sin(2\Psi) cos (\Delta)\,\!</math>
- <math>S= sin(2\Psi) sin (\Delta)\,\!</math>
Operation
Video on Woolam Ellipsometer at MiRC
Video on Woolam Ellipsometer at Cornell