Difference between revisions of "Scanning Electron Microscope"

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=== Overview ===
=== Overview ===
[[Image:Sirion_sem.png|thumb|300px|]]
[[Image:Sirion_sem.png|thumb|300px|]]
The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs are able to focus the beam E-beam lithography or are equipped for focused ion beam (FIB) milling.
The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additioanal software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling.


See Wikipedia on [http://en.wikipedia.org/wiki/Scanning_electron_microscope Scanning Electron Microscope]
See Wikipedia on [http://en.wikipedia.org/wiki/Scanning_electron_microscope Scanning Electron Microscope]


=== Operation ===
=== Operation ===

Revision as of 11:47, 14 October 2009

Overview

Sirion sem.png

The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additioanal software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling.

See Wikipedia on Scanning Electron Microscope

Operation

Video in production

Training Manual for Sirion SEM[1]

Training Video on Hitachi 3500H SEM at GT MiRC

Significance