Difference between revisions of "Scanning Electron Microscope"

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=== Overview ===
=== Overview ===
[[Image:Sirion_sem.png|thumb|300px|]]
[[Image:Sirion_sem.png|thumb|300px|]]
The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additioanal software enhancements than enable them to focus the beam on a photomask for [[E-beam lithography]] or are equipped for focused ion beam (FIB) milling.
The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additional software enhancements than enable them to focus the beam on a photomask for [[E-beam lithography]] or are equipped for focused ion beam (FIB) milling.





Revision as of 09:09, 2 November 2009

Overview

Sirion sem.png

The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additional software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling.



See Wikipedia on Scanning Electron Microscope

Operation

Basic tour

(Remaining videos in production)

Stage details


Training Manual for Sirion SEM[1]

Training Video on Hitachi 3500H SEM at GT MiRC

Significance