Difference between revisions of "Scanning Electron Microscope"
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[[Image:Sirion_sem.png|thumb|300px|]] | [[Image:Sirion_sem.png|thumb|300px|]] | ||
The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additioanal software enhancements than enable them to focus the beam on a photomask for [[E-beam lithography]] or are equipped for focused ion beam (FIB) milling. | The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additioanal software enhancements than enable them to focus the beam on a photomask for [[E-beam lithography]] or are equipped for focused ion beam (FIB) milling. | ||
[http://www.youtube.com/watch?v=5OrK-VKfqH4 Stage details] | |||
See Wikipedia on [http://en.wikipedia.org/wiki/Scanning_electron_microscope Scanning Electron Microscope] | See Wikipedia on [http://en.wikipedia.org/wiki/Scanning_electron_microscope Scanning Electron Microscope] | ||
Revision as of 15:57, 21 October 2009
Overview
The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additioanal software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling.
See Wikipedia on Scanning Electron Microscope
Operation
Basic tour
Video in production
Training Manual for Sirion SEM[1]
Training Video on Hitachi 3500H SEM at GT MiRC