Profilometer

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Overview

Profilometer is an instrument that measures a surface's profile or roughness at the nanometer level. A contact profilometer has a diamond stylus that physically touches the surface. It is not sensitive to surface color or reflectance. Optical or non-contact profilometers scan the surface with light. A confocal microscope can be used for characterizing a surface.

see wikipedia [Profilometer]

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Technique

A non-contact profilometer

Video instructions for the Wycko Profilometer at GT Microelectronics Research Center